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Microfabrication process and characteristic testing of a MEMS-based preconcentrator

NCJ Number
Julia Aebersold ; Michael Martin; Thomas J. Roussel; Robert S. Keynton; Kevin M. Walsh
Date Published
3 pages

This report describes the development of a preconcentrator that increases the collection efficiency and the signal-to-noise ratio for vapor and trace particles explosive materials.


Due to terrorist activities, it has become important to accurately detect vapor or trace particles of explosive materials. This task is difficult due to the limited number of particles available to be gathered for analysis. This article describes the preconcentrator developed in this project to increase collection efficiency to combat this problem. The fabrication process and the characteristics testing prior to use with a portable ion mobility spectrometry (IMS) is described. (Publisher abstract provided)